[G] Analysis/Characterization/Evaluation

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[190] High-resolution three-dimensional visualization of dislocations using weak-beam dark-field STEM tomography

*Yifang Zhao¹, Hirotaka Sakai¹, Hikaru Saito², Satoshi Hata³ (1. Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 2. Institute for Materials Chemistry and Engineering, Kyushu Univ., 3. Faculty of Engineering Sciences, Kyushu Univ.)

Keywords:

Scanning transmission electron microscopy,Electron tomography,Three-dimensional (3D),Dislocations

本研究では、電流増加と画像処理により、ウィークビーム暗視野STEMトモグラフィー（WBDF-STEM-ET）を用いた転位三次元観察の性能を向上させた。従来の二波励起法と比較し、改良WBDF-STEM-ETの利点と課題を検討した。