[P] P106~P129 Structural Materials

[P110] Mechanical Properties of CrAlN/SiCN Nanocomposite Coatings Depositedby ECR Plasma Sputtering

○Yuta Hanamura¹, Yusuke Hashimoto¹, Taiki Tsutiya², Lee Seungwon², Kenji Matsuda², Jose A Hernandez Gaitan¹, Yoshifumi Aoi¹, Masateru Nose^2,1 (1. Ryukoku University, 2. University of Toyama)

Keywords:

Mechanical properties,ECR plasma sputtering,CrAlN/SiCN Nanocomposite coating,High Elastic recovery,High hardness,Nanoindentation

High hardness and high elastic recovery are important for long-life hard coatings. In this study, CrAlN/SiCN thin films were prepared by ECR plasma sputtering and evaluated. The films exhibited H_IT = 34.4 GPa and W_e = 90.3%, showing both high hardness and high elastic recovery.