[P] P88~P100 Materials Processing

[P99] Evaluation of the temperature dependence of the spectral reflectance of TiNi shape memory sputtered films

○Taichi Murakami¹, Masaki Shimofuri², Toshiyuki Tsuchiya², Shugo Miyake¹ (1. Setsunan Univ., 2. Kyoto Univ.)

Keywords:

Shape memory alloy,Noncontact temperature measurement,Thermoreflectance

The temperature dependence of the reflectance spectrum of TiNi shape memory alloy thin films was evaluated. The results demonstrate the feasibility of thermoreflectance thermometry for noncontact, high spatial resolution temperature measurement.