[P] P130~P143 Energy and Related Materials

[P132] Performance Enhancement of CrN Thermoelectric Thin Films by Ti Doping for Micro Thermoelectric Generator Applications

○Junya Kurahashi¹, Yi Shuang^2,3, Yuji Sutou^1,3 (1. Tohoku Univ.(Eng.), 2. Tohoku Univ.(FRIS), 3. Tohoku Univ.(AIMR))

Keywords:

Thermoelectric thin films,Thermoelectric materials,Chromium nitride (CrN),Defect engineering,Room-temperature deposition

We investigated the effect of Ti doping on the thermoelectric properties of room-temperature-deposited CrN thin films. Ti doping alleviated the trade-off between the Seebeck coefficient and electrical conductivity, resulting in an approximately two-orders-of-magnitude enhancement in the power factor.