[P] P217~P230 Materials Chemistry

[P223] Crystal Orientation of Ru Thin Films on SUS316L

○Hibiki Horikoshi¹, Hayato Yatagawa¹, Takatoshi Nagano¹ (1. Ibaraki Univ.)

Keywords:

Ruthenium thin films,Sputtering,Crysrtal orientation

Ru(0001)-oriented films for ITER mirrors were prepared by RF magnetron sputtering. Ar pressure, RF power, and target-to-substrate distance affected crystal orientation through changes in sputtered atom energy and surface diffusion.