[P] P36~P59 Microstructures

[P47] Microstructural analysis of oxygen-defective Gd₂O_3-x thin films produced by precisely controlled oxidation

○Yuzuru Aramaki¹, Kenji Shida², Motohide Matsuda³, Mitsuhiro Matsuda³ (1. Grad. Sch. Sci. Tech. Kumamoto Univ. (Master), 2. Tech. Div. Kumamoto Univ., 3. Fac. Adv. Sci. Tech. Kumamoto Univ.)

Keywords:

oxygen deficiency,oxidation process,transmission electron microscope,Gd oxide

Oxygen-defective Gd₂O_3-x thin films were fabricated by oxidation heat treatment. Approximately 10% oxygen vacancies were introduced into the films. CTEM and HAADF-STEM observations revealed structural changes. HAADF-STEM further revealed a periodic structure with a period of approximately 1.5 nm.