[P] P36~P59 Microstructures

[P49] Effects of Vacuum Heat Treatment on CrAlN/SiCN coatings Deposited on Si Substrates

○Masashi Shimada¹, Taiki Tsuchiya¹, Seungwon Lee¹, Ahmed Abrar^4,1, Susumu Ikeno², Kenji Matsuda¹, Masateru Nose^2,3 (1. University of Toyama, 2. University of Toyama (Professor Emeritus ), 3. University of Ryukoku, 4. Advanced Aluminum International Research Center)

Keywords:

Thin Film,Transmission Electron Microscope,Scanning Transmission Electron Microscope

Al-containing CrAlN/SiCN thin films showed increased hardness after heat treatment in air, but the mechanism remains unclear. This study investigates the effects of vacuum heat treatment on their properties and microstructure.