Presentation Information
[P158]Fabrication of magnetic films via LIFT technique with sacrificial layer
○Rin Sankoda1, Itsuki Fukuda1, Akihiro Yamashita1, Takeshi Yanai1, Masaki Nakano1 (1. Nagasaki Univ.)
Keywords:
LIFT (Laser-Induced Forward Transfer),PLD（Pulsed Laser Deposition）,energy-absorbing layer,Al2OX films
To improve LIFT fabrication of Nd-based micromagnets for flexible MEMS, an Al₂Oₓ sacrificial layer was inserted between the glass donor and α-Fe film. Al₂Oₓ films with various compositions were prepared, and LIFT transfer characteristics were evaluated using α-Fe as a preliminary donor material.
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