[G] Magnetic Materials

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[139] Attempts at High-Speed Deposition of Al₂O₃ Matrix Material for Realizing Superparamagnetic Co-Al₂O₃ Granular Thin Films with High Magnetization

Takumi Kobayashi¹, Ryutaro Ono¹, Genta Egawa¹, ○Satoru Yoshimura¹ (1. Akita University)

Keywords:

Superparamagnetic,Co-Al2O3 Granular Thin Films,High-Speed Deposition

In the fabrication of Co-Al₂O₃ granular thin films via co-sputterig using DC for Co and RF for the Al₂O₃ matrix, high-speed deposition was employed to suppress the grain growth of Co nanoparticles, thereby enabling the maintenance of a superparamagnetic single phase even with high Co content.