Presentation Information
[P196]Development of contamination mitigation techniques for high-precision trace carbon analysis with EPMA
○Koki Kato1, Yasuteru Nawafune1, Takanori Murano1 (1. JEOL)
Keywords:
EPMA,contamination,trace carbon analysis
In trace carbon analysis, contamination caused by hydrocarbon decomposition due to electron beam irradiation hinders quantitative and mapping analyses. In this study, we aimed to mitigate contamination by sputtering away carbon using an Ar ion gun, thereby enables more accurate analysis of carbon.
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