[P] P177~P201 Microstructures

[P199] Preparation of Standard Samples for Nitrogen Quantification by the ¹⁴N(α,α)¹⁴N Resonance Nuclear Reaction

○Daiki Shimbori¹, Tsuneo Suzuki¹ (1. Nagaoka Univ. of Technol.)

Keywords:

Rutherford BackScattering Spectroscopy,Ion Beam Analysis,Pulsed Laser Deposition,Thin Film,Standard Sample

In this study, a Cu-CrN two-phase thin film was fabricated for high-precision nitrogen quantification. XRD and XPS confirmed the two-phase structure. Nitrogen resonance RBS measurements determined the nitrogen content to be 37.6%, with an enhancement factor R_N of 8.29.