Presentation Information
[84]Hydrogenation Characteristics and Hydrogen Detection in Nb Thin Films
○Yiming Fan1, Jundong Song1, Ji Shi1, Takashi Harumoto1 (1. Science Tokyo)
Keywords:
Niobium,Hydrogenation,Hydrogen detection,Electrical resistance
Nb thin films were fabricated by magnetron sputtering and their hydrogenation behavior was investigated by electrical resistance measurements. A clear and reproducible resistance change was observed under hydrogen exposure as low as 10 ppm. The results indicate a high sensitivity of Nb thin films to trace hydrogen.
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