[G] 水素・電池関連材料(1)

16:25 〜 16:40

[84] Nb薄膜の水素化特性とそれによる水素検出

○樊 一銘¹、宋 俊東¹、史 蹟¹、春本 高志¹ (1. 科学大)

キーワード：

ニオブ薄膜、水素化、水素検出、電気抵抗

Nb thin films were fabricated by magnetron sputtering and their hydrogenation behavior was investigated by electrical resistance measurements. A clear and reproducible resistance change was observed under hydrogen exposure as low as 10 ppm. The results indicate a high sensitivity of Nb thin films to trace hydrogen.