Presentation Information
[20p-P07-47]Study on miniaturization of shear horizontal surface acoustic wave sensor measurement system using compact vector network analyzer
〇(M1)Keiichiro Shibata1, Yudai Ota1, Jun Kondoh1 (1.Shizuoka Univ.)
Keywords:
surface acoustic wave
A measurement system for shear horizontal surface acoustic wave sensors using a compact vector network analyzer was investigated. Conventional measurement systems have used large equipment such as vector voltmeters and standard signal generators. Amplitude ratios and phase shift versus glycerol solution concentration were measured with the Nano VNA and compared with the results of numerical analysis. It was clarified that the Nano VNA can be used as a measurement system for SH-SAW sensors in this study.