[21p-A307-1~23] 6.3 Oxide electronics

6:00 PM - 6:15 PM JST(9:00 AM - 9:15 AM UTC)

[21p-A307-19] Study on reduction of oxygen defects in oxide thin films using oxidation effect of NaClO solution

〇Shutaro Asanuma¹ (1.AIST)

Keywords:

oxide,oxygen defect

In recent years, wet chemical topotactic oxidation using solutions such as NaClO has been attracting attention as a method to reduce oxygen defects near room temperature. However, the reaction mechanism is still unclear, and the impact of NaClO₃, which is generated by the disproportionation of NaClO, for example, has not been clarified. In this study, we investigated the effects of solution concentration, temperature, and ClO₃^- in topotactic oxidation using NaClO solution. The results indicated that the activation energy of the reaction with NaClO varies depending on the oxide. Moreover, it was clarified that ClO^- is involved in this reaction, while ClO₃^- is not.