[21p-C301-1~13] 11.5 Junction and circuit fabrication process, digital applications

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[21p-C301-5] Development of nitride Josephson junctions for superconducting qubits

〇Hirotaka Terai¹, Arvapalli Sai Srikanth¹, Sunmi Kim¹, Kunihiro Inomata², Taro Yamashita³, Tomoko Fuse¹, Fumiki Yoshihara^1,4, Kouichi Semba^1,5 (1.NICT, 2.AIST, 3.Tohoku Univ., 4.Tokyo Univ. of Sci., 5.Univ. of Tokyo)

Keywords:

nitride superconductor,Josephson junction,Superconducting qubit

We developed low-Jc epitaxial Josephson junctions based on nitride superconductors to apply them to a new type of superconducting qubit called merged-element transmon (MET). We have successfully fabricated Josephson junctions with a J_C of around 2 A/cm² that are required in MET. The observed R_SG/R_N was over 100 for the junctions with an MgO tunnel barrier, where R_SG is the sub-gap resistance and R_N is the normal resistance.