Presentation Information

[21p-C301-6]Development of a fabrication process for superconducting integrated circuits including ferromagnetic Josephson junctions based on nitride superconductors

〇Shigeyuki Miyajima1, Hirotaka Terai1, Taro Yamashita2, Masamitsu Tanaka3, Naoki Takeuchi4, Shigehito Miki1,5 (1.NICT, 2.Tohoku Univ., 3.Nagoya Univ., 4.AIST, 5.Kobe Univ.)

Keywords:

superconductot,niobium nitride,Josephson junction