Presentation Information
[21p-D902-13]Visualization and Quantitative Analysis of Semiconductor Oxide Single Nanowire Array Based Electronic Nose
〇Chuanlai Zang1, Hiroyasu Yamahara1, Hitoshi Tabata1 (1.Univ. of Tokyo)
Keywords:
gas sensor,E-nose
In this study, we report on the fabrication and characterization of electron beam lithography patterned nanowire-based gas sensor array. The fabrication process involved the use of electron beam lithography to pattern single nanowires of tin oxide (SnO2), indium oxide (In2O3), titanium oxide (Fe3O4), and nickel oxide (TiO2). Each material have five different diameters from 100 nm to 250 nm to increase the diversity, which were then assembled into a 20-single nanowire sensor array based E-nose. In the process of data processing, we noticed that previous feature extraction methods only focused on limited features such as response intensity and response time of the response curve. We proposed to convert the response curve of the sensor array into a heatmap so that all features can be represented. The fabricated E-nose was used to detect four kinds of volatile organic chemicals (VOCs) and the result of array was plotted into image to visualization . Also, the performance of individual sensor has been quantitatively studied.