Presentation Information
[21p-D902-5]Investigation of Width and Polarity Dependence for Electrical Characteristics and Detection Sensitivity based on Si Nanowire Biosensor
〇Fumiya Osawa1, Hui Zhang1, Yawei Qiu1, Meiko Itabashi1, Noriyasu Ohshima2, Taira Kajisa3, Toshiya Sakata4, Takashi Izumi2,5, Hayato Sone1 (1.Gunma Univ. Graduate School of Science and Technology, 2.Gunma Univ. Graduate School of Medicine, 3.Toyo Univ., 4.The Univ. of Tokyo, 5.Teikyo Heisei Univ.)
Keywords:
Si nanowire biosensor,n-type and p-type,polarity dependence
In this research, after analyzing the nanowire (NW) width and polarity dependence of detection sensitivity using theoretical analysis, n-type and p-type SiNW biosensors with different NW widths were fabricated, and electrical characteristics and detection sensitivity were investigated. From the results, we confirmed the possibility of selecting n-type and p-type SiNWs according to the polarity of the charge on the biomolecules, and detecting more minute amounts of biomolecules with high sensitivity by adjusting the NW width.