[16a-A25-1~10] 3.14 Silicon photonics and integrated photonics

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[16a-A25-1] Characterization of Integrated Lasers by a Wafer-level Probing System

〇Tsuyoshi Horikawa¹, Suguru Yoshida¹, Nobuhiko Nishiyama^1,2,3 (1.Tokyo Tech Eng, 2.Tokyo Tech IIR, 3.PETRA)

Keywords:

Integrated Photonics,Integrated Lasers,Wafer-level Inspection

We developed a wafer-level probing system for integrated lasers. High reproducibility was confirmed in automatic continuous measurements of laser intensity-current-voltage characteristics, lasing spectrum, and small signal response for InP-based membrane lasers on a single wafer.