[16a-A25-1~10] 3.14 Silicon photonics and integrated photonics

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[16a-A25-9] Validation of Si Photonics Efficient Fiber Coupler with 150 nm Minimum Feature Size

〇Naoki Tahara¹, Shota Nawa¹, Rikuto Taira¹, Saneyuki Suyama¹, Keisuke Hirotani¹, Yuriko Maegami², Tai Tsuchizawa², Noritsugu Yamamoto², Koji Yamada², Toshihiko Baba¹ (1.Yokohama Nat'l Univ, 2.AIST)

Keywords:

Silicon photonics,Fiber coupler,Grating coupler

We fabricated a grating coupler with a minimum feature size of 150 nm to efficiently couple light from a Si waveguide to an out-of-plane optical fiber. Light was injected into the waveguide from a lensed fiber module, and the coupling efficiency to a single-mode fiber vertically positioned above the grating coupler was measured. The maximum coupling efficiency was found to be 78%, which closely matched the simulation results.