[16a-A31-1~11] 17.1 Carbon nanotubes & other nanocarbon materials

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[16a-A31-1] Efficient AI-Assisted Fabrication of Carbon Nanotube-Based Nanocantilever

〇YUKIHIRO TADOKORO¹, KEITA FUNAYAMA¹, KEISUKE KAWANO¹, ATSUSHI MIURA¹, Jun Hirotani², Yutaka Ohno², Hiroya Tanaka¹ (1.TCRDL, 2.Nagoya Univ.)

Keywords:

Carbon Nanotube,AI-assisted,Nanoscale devices

Creating nanoscale devices with single Carbon nanotubes requires an enormous amount of time and labor, particularly to find them and measure their positions manually. In this study, we captured images of randomly placed CNTs on a silicon substrate using a scanning electron microscope (SEM). By combining image recognition and machine learning, we detected favorable CNTs for device fabrication and extracted the coordinates necessary for patterning. Furthermore, we automated the entire process from extracting coordinates to generating the CAD needed for device pattern creation. During the presentation, we will introduce not only the fabrication method described above but also the experimental results of the characteristics of the fabricated devices from a statistical perspective.