[16a-C43-1~11] 7.1 X-ray technologies

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)

[16a-C43-1] Design of soft X-ray high diffraction efficiency and spectral flux Au/Ni-bilayer-coated laminar-type diffraction grating for soft X-ray flat-field spectrograph in a region of 250–550 eV

〇Masato Koike^1,2,3, Tadashi Hatano², Alexander Pirozhkov¹, Yuki Oue⁴, Takanori Murano^5,3, Tsubasa Kakio⁴, Shogo Koshiya⁵, Masami Terauchi² (1.KPSI,QST, 2.IMRAM, Tohoku Univ., 3.Dept. of Eng., Osaka Metropolitan Univ, 4.Device Dept. Shimadzu Corp., 5.SA Business Unit, JEOL Ltd.)

Keywords:

diffraction grating,soft X-ray,diffraction efficiency

To improve the detection limit and sensitivity of a soft X-ray flat-field spherical grating spectrometer in the so-called water window region from C-K (277 eV) to O-K (524 eV), we optimized the groove structure of a laminar grating as well as the surface coating materials of Au/Ni double-layer coating. Numerical calculations of the diffraction efficiency showed that, in the region >400 eV, the diffraction efficiency increased by up to about 30% in O-K compared to that of a Ni bulk surface due to the Ni coating thickness.