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[16p-A21-7]UV laser diode structure using n-type AlN/AlGaN superlattice cladding layer

〇Kazuaki Ebata1, Kouta Tateno1, Kazuyuki Hirama1, Kazuhide Kumakura1, Yoshitaka Taniyasu1 (1.NTT BRL)
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Keywords:

AlGaN,n-type,laser


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