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[16p-A25-15]InGaAs/Si Hybrid Plasmonic Waveguide Photodetector using Ni-InGaAs Alloy

〇Kentaro Komatsu1, Taketoshi Nakayama1, Tomohiro Akazawa1, Yousuke Wakita1, Hiroya Sakumoto1, Chao Zang1, Yuto Miyatake1, Stephane Monfray2, Frederic Boeuf2, Rui Tang1, Kasidit Toprasertpong1, Shinichi Takagi1, Takenaka Mitsuru1 (1.The Univ. of Tokyo, 2.STMicroelectronics)
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Keywords:

silicon photonics,photodetector

In silicon photonics, plasmonic waveguide photodetectors are expected to be ultra-compact and high-speed due to the ability to confine light into the nanogap between metals. In this study, we fabricated an InGaAs/Si hybrid plasmonic photodetector using a Ni-InGaAs alloy and confirmed its operation with a responsivity of 0.13 A/W and an operation speed of 12 Gbit/s.

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