Presentation Information
[16p-A31-13]CNT forest film for thermal interface materials
〇Tomoki Okumura1, Takayuki Nakano1, Yoku Inoue1 (1.Shizuoka Univ.)
Keywords:
carbon nanotube,thermal interface material
CNT forests were synthesized on Si substrates by thermal CVD method. The TIM was fabricated by sandwiching PVDC (10 μm) between two synthetic substrates and fusing them together under high temperature and pressure.The thermal resistance of the CNT-TIM was evaluated to be 0.97 cm²K/W, and it was confirmed that the PVDC layer was not a thermal resistance barrier.
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