[16p-C43-1~12] 1.5 Instrumentation, measurement and Metrology

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[16p-C43-10] Development of Resonant-type Pressure and Acceleration Sensors Using Organic Piezoelectric

〇Yuki Noda¹, Kunihiro Matsubara², Naomi Toyoshima¹, Tsuyoshi Sekitani¹ (1.SANKEN, Osaka Univ., 2.Yamamoto Electric Works Co., Ltd.)

Keywords:

differential pressure,gauge pressure,acceleration

Pressure sensors and acceleration sensors are indispensable in various industrial fields to ensure system safety and efficiency, with expectations for miniaturization and cost reduction. In this study, we developed a resonant sensor using the inverse and direct piezoelectric effects of piezoelectric materials and used it to measure gauge pressure and acceleration. The gauge pressure could be measured in the range of ±2 kPa with increments of 500 Pa, and the acceleration could be measured in the range of 10 Hz to 1010 Hz and 1 m/s² to 10 m/s².