[16p-D63-1~17] CS.9 Code-sharing Session of 6.5 & 7.5

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[16p-D63-13] Multilayer deposition with ultra-high vacuum vessel and welding using 0.2%Be-Cu material

〇Takao Nakamura¹, Masanao Sasaki², Kazynari Okahashi², Shinsuke Kishikawa², Masahide Kuroiwa², Mikihiko Oogane³ (1.Mie University, 2.Tokyo Electronics, 3.Tohoku Unibersity)

Keywords:

Be-Cu,vacuum vessel,welding

0.2% Be-Cu has excellent properties such as high thermal conductivity 13 times higher than SUS, low thermal radiation less than 1/7, and low outgassing, and is used in vacuum components for ultra-high vacuum systems. In this study, we developed a minimal MBE device equipped with a vacuum container made by cutting BeCu material, fabricated an Fe/Mg/Fe laminated structure, which is the basic structure of a TMR magnetic sensor, and evaluated the laminated structure. Furthermore, in order to reduce costs with the aim of social implementation, we investigated the application of welding using a hybrid laser to the problem that BeCu can only be processed by cutting.