[16p-D63-1~17] CS.9 Code-sharing Session of 6.5 & 7.5

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[16p-D63-17] Reaction kinetics of Single-step Oxidation Loop A and Double-step Oxidation Loop B: Comparison between p-Si(001) and n-Si(001) surfaces

〇Yasutaka Tsuda¹, Akitaka Yoshigoe¹, Shuichi Ogawa², Yuji Takakuwa^1,3 (1.JAEA, 2.Nihon univ., 3.Tohoku univ.)

Keywords:

silicon,oxidation,X-ray photoemission spectroscopy