[16p-P05-1~27] 12.1 Fabrications and Structure Controls

[16p-P05-6] Film Fabrication and Electrical Characterization of Dielectric P(VDF-TrFE-CFE) Polymer

〇Yusuke Okita¹, Yoshiki Hidaka¹, Hirotaka Okabe¹, Takuya Kiguchi², Yasuyuki Hikita², Kenji Ishida¹ (1.Kyushu Univ., 2.DENSO CORP.)

Keywords:

P(VDF-TrFE-CFE),Thin film,dielectric constant