[16p-P07-1~46] 1 Interdisciplinary Physics and Related Areas of Science and Technology (Poster)

[16p-P07-21] Non-Destructive Soft Electric Contact Probe for Ultra-thin Films and Fragile Specimens

〇Michiko Yoshitake¹, Kaori Omata^2,3, Hideyuki Kanematsu² (1.NIMS, 2.NIT-Suzuka, 3.Univ. Yamanashi)

Keywords:

electric contact,non-destructive,constant contact area

Non-destructive soft electric contact probe has been developed. This time, probes having a controlled contact area have been developed in different two ways. One is to control by laser lithograpy, which conditions have been optimized. The other is to make convex-shaped probe by pushing a glass with a hole onto Au hemisphere.