[16p-P08-1~6] KS Sessions organized by JSAP's Professional Group (Poster)

[16p-P08-2] Fabrication of an NV-center diamond pillar probe using thermal etching

〇(M2)Yuma Aoki¹, Yifei Wang¹, Kunitaka Hayashi¹, Dwi Prananto¹, Yingshu Ma¹, Seong-Woo Kim², Koji Koyama², Masashi Akabori¹, Toshu An¹ (1.JAIST, 2.Orbray Co.)

Keywords:

Quantum sensing,Diamond NV center

This study aims to fabricate NV center diamond pillar probes using the thermal etching method, and to apply them to scanning NV center probes. The use of thermal etching has an advantage in fabricating diamond pillar probes with a high-aspect ratio compared with conventional lithography methods, such as photolithography and electron lithography. The optimization of thermal etching methods, the evaluation of NVs in the fabricated pillar probes, and the performance of the scanning NV probes will be presented.