[17a-C43-1~8] 1.3 Novel technologies and interdisciplinary engineering

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)

[17a-C43-8] Fabrication of Micro-lens for 3D optical connection

〇(M1)Keito Kikuchi^1,2, Tato Itatani², Takeru Amano², Yoshinobu Okano¹ (1.Tokyo City Univ., 2.AIST.)

Keywords:

optical mount,micro,lens

In the field of optical packaging, where electrical and optical elements are mounted on the same substrate, it is necessary to couple the silicon optical waveguide from the integrated circuit and the polymer optical waveguide for connection to the optical fiber in three dimensions. However, direct coupling is difficult because the dimensions of the silicon optical waveguide and polymer optical waveguide to be coupled differ by one order of magnitude and the height at which they are installed differs. In this study, we have fabricated microlenses that are placed in close proximity to silicon optical waveguides using anisotropic etching of semiconductors.
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