[17p-B4-1~20] CS.10 Code-sharing Session of 6.6 & 12.2

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[17p-B4-10] Adhesion Force Measurement at Surfaces of an Insulation Film on Semiconductor Wafer by AFM in Liquids

〇Daiki Oka¹, Yoshihiko Asano¹, Takahiko Ikarashi¹, Kyosuke Matsumoto¹, Kazuki Miyata¹, Megumi Uno², Chikako Takatoh², Takeshi Fukuma¹ (1.Kanazawa Univ., 2.EBARA Corp.)

Keywords:

Semiconductor Wafer,AFM in Liquids,Adhesion Force Measurement