[17p-B6-1~16] 12.4 Organic light-emitting devices and organic transistors

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)English Presentation

[17p-B6-2] Photoreaction and Photo-densification Process of PHPS under High-power VUV

〇Luyang Song¹, He Sun¹, Yoshiyuki Suzuri¹ (1.Yamagata Univ.)

Keywords:

perhydropolysilazane (PHPS),photoreaction,thin film encapsulation

OLEDs, PePVs, and OPVs degrade when exposed to oxygen and water vapor, but encapsulation with barrier materials can protect these devices. Our group developed a high-performance barrier film using PHPS and VUV light under nitrogen, forming a dense SiNx layer with excellent WVTR. However, the photoreaction and photo-densification process of PHPS under high-power VUV light is not fully understood. In this study, we examined the effect of VUV light intensity on PHPS photo-densification using lamps at 103, 229, and 309 mW/cm². Higher lamp power reduced irradiation time and optimized the densification process. Efficient single-photon reactions involved N-H and Si-H bond cleavage, with significant effects observed above 290 mW/cm². We compared the refractive index of the top 30 nm layer, finding that higher lamp power enhances Si-N bond cleavage, altering film dynamics and reducing free volume. High-intensity light promotes rapid cross-linking and network reconstruction, which are crucial for achieving ultra-high barrier properties.