[17p-C301-1~11] 9.4 Thermoelectric conversion

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[17p-C301-5] Thermoelectric properties of epitaxial B20-CoSi thin film/Si with peculiar band structure

〇Takafumi Ishibe^1,2, Kazunori Sato³, Yuichiro Yamashita⁴, Yoshiaki Nakamura^1,2 (1.Eng. Sci., Osaka Univ., 2.OTRI, Osaka Univ., 3.Eng., Osaka Univ., 4.AIST)

Keywords:

Thermoelectric material,Silicide,Dirac band

Thermoelectric film is attracting much attention as a stand-alone power source for Internet of Things sensor. In 2019, B20-CoSi bulk with a peculiar band structure (Dirac band and Heavy hole band) near Fermi energy exhibited high thermoelectric power factor because of the electron-phonon interaction. However. there have been no studies about the epitaxial growth of B20-CoSi film/Si nad its thermoelectric properties have not also been revealed. This study characterizes the thermoelectric properties of epitaxial B20-CoSi film/Si and reveals carrier transport physics.