[17p-C31-1~20] 12.7 Biomedical Engineering and Biochips

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)

[17p-C31-17] Investigation of Structure Shape for Sensitivity Improvement of 3D Stress Image Sensor

〇Hiromasa Ito¹, Mizuki Odaira¹, Hideo Doi¹, Kensuke Murakami¹, Ken Ogasahara², Satoshi Shimizu², Tomoko Horio¹, Daisuke Akai¹, Takeshi Hizawa¹, Yong-Joon Choi¹, Kazuhiro Takahashi¹, Toshihiko Noda¹, Kazuaki Sawada¹ (1.Toyohashi Univ., 2.Daikin Finetech, Ltd.)

Keywords:

three-dimesional force image sensor,structure,shear force

Toward the high sensitive detection to shear force, we investigated the structure shape by changing the ratio of height and area of a structure on the three-dimensional force image sensor. The sensor response for the fabricated new structure with 6×6 µm area and 10 µm height was 5 time bigger than that of the conventional shape (Area: 8×8 µm, Height: 6 µm). It was also confirmed that the sensitivity for the shear force was improved from 0.085 mV/µN to 0.19 mV/µN. We demonstrated that smaller size area and higher height of the structure is important for high sensitive force detection.