[17p-C31-1~20] 12.7 Biomedical Engineering and Biochips

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-C31-3] Fabrication and Evaluation of Wide Bandwidth Humidity Sensor With Comb-shaped Electrodes

〇Yuji Kato¹, Ryosuke Katsurai², Du Bang¹, Hisashi Kino³, Takafumi Fukushima^1,2, Tetsu Tanaka^1,2 (1.Grad. Sch. Eng, Tohoku Univ., 2.Grad. Sch. Biomed Eng, Tohoku Univ., 3.Grad. Sch. ISEE, Kyushu Univ.)

Keywords:

Humidity Sensor,Semiconductor

By 2045, the global number of people with diabetes is projected to increase to approximately 783 million. With delayed detection of diabetes being a significant issue, non-invasive and miniaturizable glucose meters utilizing the Metabolic Heat Confirmation (MHC) method are gaining attention, requiring various small sensors. In this study, we developed a capacitive humidity sensor for wide-range humidity sensing by arranging electrodes in a comb shape and coating them with a highly hygroscopic polymer material. The presentation will detail the evaluation results of the sensor's electrical characteristics.