Presentation Information

[17p-C42-6]Selective-area MOVPE of AlInP fins on InP(111)A

〇Yuki Azuma1, Ziye Zheng1, Junichi Motohisa1, Katsuhiro Tomioka1 (1.Hokkaido Univ.)

Keywords:

MOVPE,Selective-area growth,Growth fin structure


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