[17p-C43-1~17] 1.6 Ultrasonics

3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)

[17p-C43-10] Evaluation of ScAlN Thin Films by Line-Focus-Beam Ultrasonic-Material-Characterization System

〇Yuji Ohashi¹, Jun-ichi Kushibiki¹, Kentaro Totsu¹, Ayaka Hanai², Ayaka Katsumata², Takahiko Yanagitani², Hiroaki Takeno³, Takahiro Ito³ (1.Tohoku Univ., 2.Waseda Univ., 3.GEOMATEC Co. Ltd)

Keywords:

piezoelectric thin film,leaky surface acoutice wave velocity