[17p-C43-1~17] 1.6 Ultrasonics

2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[17p-C43-7] Development of Sound Absorption Coefficient Simulation of Sound Absorbing Materials for High Repetition Rate Excimer Lasers

〇Takuya Ogawa¹, Youichi Sasaki¹, Makoto Tanaka¹, Tsukasa Hori¹, Kouji Kakizaki¹, Takashi Yamamoto² (1.Gigaphoton Inc., 2.Kogakuin Uni.)

Keywords:

discharge noise,sound absorption material

Discharge-pumped excimer lasers are used as light sources for semiconductor lithography equipment, and are required to have a high repetition rate of over 6 kHz. The discharge noise (60 kHz) emitted by the discharge is reflected by the chamber wall and re-enters the laser oscillation area, which is a problem. In this study, the sound absorption coefficient simulation used in the audible range was extended to the high frequency range of 60 kHz and its validity was verified.