Presentation Information
[17p-C43-9]New method for extracting mechanical quality factor Qm of ScAlN, AlN, ZnO films by using ultra sonic pulse echo method
〇(M2)Yohkoh Shimano1,2, Takahiko Yanagitani1,2 (1.Waseda Univ., 2.ZAIKEN)
Keywords:
mechanical Q factor,BAW,ScAlN
The mechanical quality factor Q, which originates from acoustic attenuation, is one of the important evaluation factors for piezoelectric devices. Especially in BAW and SAW filters, the Q factor indicates steepness in the frequency domain. It is an extremely important factor to prevent interference in the dense wireless bands in recent 5G or beyond 5G communications.
The mechanical quality factor Qm can be determined from the full width at half maximum of the real part of the impedance, and so on. However, since these methods can only determine the effective Qm including electrode effects such as resistivity and lateral acoustic energy leakage, the intrinsic Qm of the material cannot be determined unless the electrode geometries are optimized. Therefore, in this study, we propose a new method for evaluating intrinsic Qm (attenuation constant a/f 2). In this report, we evaluated the intrinsic Qm of Sc0.4Al0.6N, AlN, and ZnO films by using the proposed method.
The mechanical quality factor Qm can be determined from the full width at half maximum of the real part of the impedance, and so on. However, since these methods can only determine the effective Qm including electrode effects such as resistivity and lateral acoustic energy leakage, the intrinsic Qm of the material cannot be determined unless the electrode geometries are optimized. Therefore, in this study, we propose a new method for evaluating intrinsic Qm (attenuation constant a/f 2). In this report, we evaluated the intrinsic Qm of Sc0.4Al0.6N, AlN, and ZnO films by using the proposed method.
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