[17p-P01-1~16] 6.4 Thin films and New materials

[17p-P01-10] Search for radical hydrogen supply conditions for the synthesis of highly crystalline BaH₂ thin films

〇Nozomi Tada¹, Ichioka Toshiki¹, Fukushi Erika¹, Oguchi Hiroyuki¹ (1.Shibaura Tech.)

Keywords:

Metal hydride thin film

BaH₂ is one of the hydrido conductors known to have high hydrido conductivity and is expected to have device applications. We have successfully attempted to synthesize thin films of this material. However, due to the high reactivity of BaH2 with moisture, a protective film was deposited in a separate apparatus after the film deposition, but the degradation was so severe that accurate crystal information and hydrido conductivity could not be obtained. In this study, protective films were deposited in the same equipment and the films were subsequently evaluated to explore the suitable radical hydrogen supply conditions for the growth of highly crystalline films.