[17p-P01-1~16] 6.4 Thin films and New materials

[17p-P01-13] Analysis of magnetic garnet thin film deposition process by reflectance spectra measurement

〇Shun Nakazawa¹, Keigo Kangori¹, Ryosuke Hayano¹, Jian Zhang¹, Fatima Zahra Chafi¹, Masami Nishikawa¹, Masami Kawahara², Takayuki Ishibashi¹ (1.Nagaoka Univ. of Tech., 2.Kojundo Chem. Lab.)

Keywords:

magnetic thin film,MOD

We have previously developed a deposition method for Bi-substituted rare earth iron garnets by the excimer-laser assisted MOD and succeeded in lowering the main annealing temperature to 450 °C. However, to lower the deposition temperature further, it is necessary to lower the temperature of the provisional annealing process as well as the main annealing process further. Therefore, in order to evaluate the thin films in real time, deposition was performed while performing in-situ reflectance spectrum measurements.