[17p-P01-1~16] 6.4 Thin films and New materials

[17p-P01-6] Deposition and Characterization of Epitaxial Fe-doped ITO Films

〇Takumi Kado¹, Haruka Kurihara¹, Saiki Kitagawa^1,2,3, Toshihiro Nakamura^1,3 (1.Kyoto Univ., 2.JSPS, 3.ILAS, Kyoto Univ.)

Keywords:

transparent conductive film,diluted magnetic semiconductor,epitaxial film

Diluted magnetic semiconductors (DMSs) have gained much attention because of their potential application in spintronic devices. In this work, we prepared epitaxially grown Fe-doped indium tin oxide (ITO) films on single crystalline yttria stabilized zirconia substrates with (111) and (100) plane orientations by rf magnetron sputtering and investigated systematically their electrical, optical and magnetic properties. The low electrical resistivity of the epitaxial Fe-doped ITO films was confirmed by Hall effect measurements. The optical spectroscopic measurements indicate that the epitaxial Fe-doped ITO films are optically highly transparent. The magnetic measurements signify that the epitaxial Fe-doped ITO films are ferromagnetic above room temperature. The coexistence of high electrical conductivity, high visible transparency, and high-temperature ferromagnetism in the Fe-doped ITO films is expected to be a desirable property for developing next-generation spintronic devices.