Presentation Information
[17p-P03-7]Hetero-epitaxial Growth of Cubic Al/AlN/Al/TiN for Superconducting Qubits
〇Junichi Yamaguchi1, Kenjiro Hayashi1, Daiyu Kondo1, Yoshiyasu Doi1, Shintaro Sato1 (1.Fujitsu Limited)
Keywords:
superconductor,Josephson junction,epitaxial growth
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