[18a-A23-1~13] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

10:45 AM - 11:00 AM JST(1:45 AM - 2:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[18a-A23-7] Si two-dimensional-superlattice MOS transistor and effective-mass enhancement

〇(M2)Yuto Sugimoto¹, Hiro Akahori¹, Kota Takeuchi¹, Yuryo Tozawa¹, Hiroaki Satoh^1,2, Masahiro Hori^1,2, Yukinori Ono^1,2 (1.Shizuoka Univ., 2.RIE Shizuoka Univ.)

Keywords:

MOS transistor,Two-dimensional-superlattice,Effective-mass