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[18a-A25-2]Effect of defects states in laser excitation of silicon

〇Tomohito Otobe1 (1.KPSI QST)
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Keywords:

Laser processing,Defect,First-principles calculation

Most laser processing simulations have been performed on perfect crystals, and the effects of defects have not been evaluated over the non-linear regime. In this study, linear and non-linear optical absorption processes due to point defects in silicon are calculated using the first-principles simulation code SALMON, and the effects of defects, such as the color centers they create, are investigated.

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