Presentation Information

[18a-A25-3]Time-Resolved Complex Optical Field Imaging of Deep-UV Nanosecond Pulsed Laser Processing of Dielectrics

〇Shotaro Kawano1, Keiichiro Toda1, Haruyuki Sakurai1, Kuniaki Konishi1, Takuro Ideguchi1 (1.The Univ. of Tokyo)

Keywords:

Nanosecond pulsed laser processing,Time-resolved complex optical field imaging

We report on implementing a time-resolved complex optical field imaging system for observing nanosecond pulsed laser ablation of dielectrics from the nanosecond to the sub-millisecond time domain. The amplitude transmittance and optical-phase-delay images we observed at each time point reflect the process of thermal and structural changes during processing.

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