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[18a-A25-4]Observation of influences of plasma shielding for laser drilling using nanosecond pulses and long pulses of a Nd:YAG laser.

〇Takeshi Tsuji1, Itsuki Yamada1, Daisuke Nakamura2 (1.Shimane Univ., 2.Kyushu Univ.)
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Keywords:

laser drilling,plasma shielding

Our previous work showed that the efficiency of drilloing of metal foils was significantly increased using long-pulses of a conventional Nd:YAG laser than using nanosecond pulses. In that work, we attributed the higher drilling efficiency for long-pulses to the lower efficiency of plasema shielding for long-pulses than that for nanosecond pulses. In the present work, we carried out observation of plasma shielding.

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